The dimensional information at 850°C is omitted in the plots of Figure 4a,b. In terms of the SAR between 550°C and 800°C, with the size increase of droplets, the SAR also gradually increased: 10.72%
at 550°C, 13.32% at 700°C, and 19.16% at 800°C. However, at 850°C, with the melting of Au droplets, the SAR was dropped to 9.16%. Similarly, the R q between 550°C and 800°C kept increasing: 4.024 nm at 550°C, 4.158 nm at 700°C, and 6.856 nm at 800°C. Then, with the surface melting, the R q got much reduced to 3.912 nm at 850°C, which is comparable to the one at 350°C. FFT power spectra of samples between 550°C and 800°C showed improved uniformities as shown in Figure 5(a-3) and (c-3) with symmetric round VX-689 order patterns Selleck AMN-107 as compared with the samples at 50°C to 350°C. With increased annealing temperature, the surface diffusion can become more favorable
and thus better uniformity can result. At 850°C, the FFT got dimmer likely due to the melting. In short, as the annealing temperature was increased, the average density gradually decreased and the decrease in density was compensated by expansion of dimension, i.e., AH and LD. This trend, increased droplet dimensions associated with decreased density along with increased fabrication temperature, is a AZD1152 mouse conventional behavior of metal droplets [30–32] and even of quantum structures and nanostructures [33–35] on various semiconductor surfaces. With increased annealing temperature, the surface diffusion as well as the
diffusion length can be further enhanced, which consequently can result in increased dimension of metal droplets. The density can be higher at a lower temperature due to a shorter diffusion length with lower thermal energy and vice versa. Once droplets grow larger, they have lower surface energy and thus can attract more nearby adatoms and tend to grow larger until reaching the equilibrium. In any case, in general, the density change is accompanied with dimensional compensation. Figure 5 Farnesyltransferase Annealing temperature variation between 550°C to 850°C with 2-nm Au deposition for 30 s. (a) to (d) are AFM top views and (a-1) to (d-1) show AFM side views of 1 × 1 μm2 areas. (a-2) to (d-2) show the cross-sectional surface line profiles, (a-3) to (d-3) are the 2-D FFT power spectra, and (a-4) to (d-4) are the height distribution histograms. Figure 6 shows Au droplets fabricated at an extended annealing duration in Figure 6(a) and with an increased deposition amount in Figure 6(b). Au droplets were fabricated at × 5 extended annealing duration of 150 s with the identical amount of 2 nm at 700°C, comparable with Figure 5(b). As shown with the AFM top view in Figure 6(a) and the side view in Figure 6(a-2), the resulting droplets are quite similar to those of the sample in Figure 5(b). For example, the size and density were quite similar and the uniformity was also similar, indicating that the extended annealing duration has a minor effect on the Au droplets.